专利名称：GUARD RING STRUCTURE
发明人：RODGERS, Paul Michael,ROBERTSON,
Michael James,RIMINGTON, Julie Joan
申请号：EP90908585.0申请日：19900608公开号：EP0477214A1公开日：19920401
摘要： Avalanche photodiode having a guard ring beryllium. Beryllium is implanted ata dosage of at least 5 x 1014 per cm2 and preferably from 3 x 1015 per cm 2 and thenannealed to produce a guard ring having a profile core and a p + tailed surlinéaires levels.The dopant profile of the ring immediately adjacent to the core is guardsurlogarithmique.
申请人：BRITISH TELECOMMUNICATIONS public limited company
地址：151 Gower Street London WC1E 6BA GB
国籍：GB
代理机构：Dutton, Erica L. G.
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